Here is a summary table of the industrial gas meter FGA-5000 series, sensor module Z series products.

We have introduced special gases for semiconductor scrubbers such as CF4, N2O, NF3, and hydrocarbon gases such as CH4, THC, and refrigerant gases such as SF6 at a glance.

For detailed information on sensors for each gas type, please check the product description on the website, and if you contact sales@eltsensor.co.kr, we will provide detailed consultation and product introduction.

CF4, N2O, NF3, SF6, CH4, SO2, NO2, THC ..